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AIXTRON QXP 8300 ALD

ALD Temperatur Range
Cassette-to-Cassette
ALD Loading
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ALD Substrate Size
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ALD Plasma Enhanced (PEALD)
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ALD Insitu Diagnostics
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ALD Glovebox Integration
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QXP-8300 ALD System Next Generation ALD Product for Dielectric, Metal and NVM Films

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