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ALD Nanosolutions FBX

ALD Temperatur Range
200°C or 450°C Maximum
ALD Loading
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ALD Substrate Size
(Particle coating)
ALD Plasma Enhanced (PEALD)
-
ALD Insitu Diagnostics
Mass Specctrometer (standard), QCM (option)
ALD Glovebox Integration
inquire
FBX offers the well characterized fluidized bed processing vessel; widely used, easy scaled, and excellent for thermal ALD.

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