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ALD Nanosolutions RX

ALD Temperatur Range
200°C or 450°C Maximum
ALD Loading
ALD Substrate Size
(Particle coating, 2, 75, or 150 mL)
ALD Insitu Diagnostics
QCM, Mass Spectrometer (optional)
ALD Glovebox Integration
RX ALD uses a rotating bed style, which allows for easier loading and unloading, static dosing, glove box loading, and optional plasma processing. Both reactor styles are benchmark designs used for years to produce state of the art coated materials.

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