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Arradiance GEMStar-A Benchtop Controlled Gas Environment Anneal System

ALD Temperatur Range
up to 500 ºC
ALD Loading
Top panel with rear facilities interface
ALD Substrate Size
up to 200 mm
ALD Plasma Enhanced (PEALD)
inquire
ALD Insitu Diagnostics
QCM
ALD Glovebox Integration
inquire
The 200mm square system anneals substrates in a vacuum controlled user selectable gas environment.

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