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Arradiance GEMStar XT Benchtop ALD

ALD Temperatur Range
25 - 300 °C
ALD Loading
Top panel with rear facilities interface
ALD Substrate Size
100, 150 or 200 mm
ALD Plasma Enhanced (PEALD)
ALD Insitu Diagnostics
QCM
ALD Glovebox Integration
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GEMStar XT offers Benchtop Thermal ALD and Plasma Enhanced PEALD systems with reactors specifically tailored for multiple 100, 150 or 200 mm round or square substrates. Because of the unique hot-wall design, the upgradeable systems are perfect for challenging materials such as nano-powders, high aspect ratio/high surface area three-dimensional structures, and odd-shaped sample pieces as well as wafers.

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