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Cambridge Nano Tech Savannah ALD

ALD Temperatur Range
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ALD Loading
Manual, Top Load
ALD Substrate Size
up to 300 mm
ALD Plasma Enhanced (PEALD)
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ALD Insitu Diagnostics
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ALD Glovebox Integration
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Ultratech/Cambridge NanoTech is the leading provider of atomic layer deposition (ALD) systems for research and industry worldwide, delivering comprehensive services and versatile, turnkey systems that are accessible, affordable and accurate to the atomic scale. Thin film deposition is our expertise.

Our Savannah Series of thin film deposition tools exemplifies these competencies

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