We help scientists to compare scientific instruments
PDFPrint

Nanomaster NLD-4000

ALD Temperatur Range
up to 400 °C
ALD Loading
Auto
ALD Substrate Size
up to 152.4 mm
ALD Plasma Enhanced (PEALD)
ICP
ALD Insitu Diagnostics
inquire
ALD Glovebox Integration
inquire
NLD-4000 is a stand alone, PC controlled ALD system with LabVIEW software featuring four levels password-controlled user authorization. The system is fully automated and safety-interlocked and offers flexibility to deposit multiple films (ex. Al2O3, AlN, TiN, ZrO2, LaO2, HfO2) for Semiconductor, Photovoltaic and MEMS applications. It has a 12" aluminum reaction chamber

ABOUT Science Duel Life

science.duel.life & mynexttool Is a Free-Access Scientific Instrument Database.

Accurate and truthful parameter filters for all instruments and manufacturers provide a positive experience to our users.

CONTACT

New York, NY

Berlin, Germany

CUSTOMER SUPPORT

Come back tomorrow for more.