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SVT Associates NorthStar ALD-P-100B

ALD Temperatur Range
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ALD Loading
Loadlock option
ALD Substrate Size
up to 100 mm, optional 300 mm
ALD Plasma Enhanced (PEALD)
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ALD Insitu Diagnostics
RGA, QMC
ALD Glovebox Integration
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SVT Associates' NorthStar Atomic Layer Deposition system is a versatile research deposition tool for thermal or energy enhanced ALD. With up to 8 precursor lines and a hot wall — cross flow deposition chamber, a wide range of applications may be performed from a single system.

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