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SVT Associates NorthStar ALD-P-200B

ALD Temperatur Range
up to 500°C
ALD Loading
Quick hatch, Loadlock, Casette-to-Cassette
ALD Substrate Size
up to 200 mm, optional 300 mm
ALD Plasma Enhanced (PEALD)
inquire
ALD Insitu Diagnostics
RGA, QMC
ALD Glovebox Integration
inquire
SVT Associates' NorthStar Atomic Layer Deposition system is a versatile research deposition tool for thermal or energy enhanced ALD. With up to 8 precursor lines and a hot wall — cross flow deposition chamber, a wide range of applications may be performed from a single system.

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