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FEI Metrios TEM for Electronics

EM Resolution
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EM Magnification
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EM Acceleration Voltage
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EM Source
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EDS
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Focused Ion Beam
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Type
TEM
The first TEM dedicated to the semiconductor industry: The Metrios system is the first TEM dedicated to providing the fast, precise measurements that semiconductor manufacturers need to develop and control their wafer fabrication processes. Extensive automation of the basic TEM operation and measurement procedures minimizes requirements for specialized operator training. Its advanced automated metrology routines deliver greater precision than manual methods. The Metrios TEM is designed to provide customers with improved throughput and lower cost-per-sample than other TEMs.

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