Hitachi SU-70 UHR Schottky (Analytical) FE-SEM
1.0 @ 15kV
EM Acceleration Voltage
Schottky thermal ﬁeld emitter
Focused Ion Beam
A field-emission SEM designed to perform ultra-high resolution imaging together with various analytical functions. The SU-70 is a new-concept SEM, incorporating Hitachi’s field-proven semi-in-lens technology and a new Schottky electron gun. It features not only ultra-high resolution (1.0 nm/15kV, 1.6nm*/l kV) but also reduced charge-up imaging, compositional-contrast imaging, and ultra-low voltage imaging (deceleration mode) derived from Hitachi’s highly reputed Super ExB filter technology.