Hitachi SU8240 Ultimate Cold Field Emission SEM
0.8 nm @ 15 kV
20x - 1.000.000x
EM Acceleration Voltage
0.5 - 30 kV Normal Optics, 0.01 - 2 kV (Landing Voltage with Decelerating optics)
Cold cathode field emission s
Focused Ion Beam
The 8240 -Regulus stage, high precision stage model- employs a novel cold field emission (CFE) gun for improved imaging and analytical performance. The newly designed Hitachi CFE gun complements the inherent high resolution and brightness of conventional CFE with increased probe current and beam stability.