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Hitachi SU8240 Ultimate Cold Field Emission SEM

EM Resolution
0.8 nm @ 15 kV
EM Magnification
20x - 1.000.000x
EM Acceleration Voltage
0.5 - 30 kV Normal Optics, 0.01 - 2 kV (Landing Voltage with Decelerating optics)
EM Source
Cold cathode field emission s
EDS
Optional
Focused Ion Beam
-
Type
SEM
The 8240 -Regulus stage, high precision stage model- employs a novel cold field emission (CFE) gun for improved imaging and analytical performance. The newly designed Hitachi CFE gun complements the inherent high resolution and brightness of conventional CFE with increased probe current and beam stability.

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