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Phenom XL Desktop SEM

EM Resolution
< 20nm
EM Magnification
80x - 100.000x
EM Acceleration Voltage
4.8kV, 5 kV, 10 kV and 15 kV
EM Source
Tungsten, CeB6 optional
EDS
Optional
Focused Ion Beam
-
Type
SEM
The Phenom XL Scanning Electron Microscope (SEM) pushes the boundaries of compact desktop SEM performance. It features the proven ease-of-use and fast time-to-image of any Phenom system.

It is also equipped with a chamber that allows analysis of large samples up to 100 mm x 100 mm. A proprietary venting/loading mechanism ensures the fastest vent/load cycle in the world, providing the highest throughput. A newly developed compact motorized stage enables the user to scan the full sample area, and yet the Phenom XL is a desktop SEM that needs little space and no extra facilities. Ease-of-use is given an extra boost in the Phenom XL with a single-shot optical navigation camera that allows the user to move to any spot on the sample with just a single click – within seconds.

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