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TESCAN VEGA3 GM

EM Resolution
3 nm @ 30 kV, 2 nm @ 30 kV (SE, High Vacuum Mode)
EM Magnification
2x - 1.000.000x
EM Acceleration Voltage
0.2 - 30kV
EM Source
Tungsten, Lab6 optional
EDS
Optional
Focused Ion Beam
-
Type
SEM
A fully PC controlled SEM with conventional tungsten (optionally LaB6) heated cathode intended for both - for high vacuum as well as for low vacuum operations.

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