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Gerneral Information

Ellipsometry is an optical technique for investigating the dielectric properties (complex refractive index or dielectric function) of thin films. Ellipsometry can be used to characterize composition, roughness, thickness (depth), crystalline nature, doping concentration, electrical conductivity and other material properties. It is very sensitive to the change in the optical response of incident radiation that interacts with the material being investigated.

Typically, the measured signal is the change in polarization as the incident radiation (in a known state) interacts with the material structure of interest (reflected, absorbed, scattered, or transmitted). The polarization change is quantified by the amplitude ratio, Ψ, and the phase difference, Δ (defined below). Because the signal depends on the thickness as well as the materials properties, ellipsometry can be a universal tool [1] for contact free determination of thickness and optical constants of films of all kinds.

Here is a market overview of instruments made by specialist manufacturers and companies around the globe.

Ellipsometer

Accurion nanofilm_ep4

Imaging: The new generation of microscopic thin film, surface and materials metrology tool uses a combination of auto nulling ellipsometry and...

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SCI FilmTek 2000

FilmTek 2000 combines a fiber-optic spectrophotometer with revolutionary material modeling software to provide an affordable and reliable tool for...

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J.A. Wollam T-Solar

The T-Solar™ ellipsometer combines the best photovoltaic measurement technology into a single system designed specifically for textured samples.

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HORIBA Smart SE

Designed for your thin film measurements, to deliver maximum efficiency with simplicity: The Auto SE is a new thin film measurement tool that allows...

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Angstrom Sun SE200BM-M300

Wavelength range: 250 to 1100 nm

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SENTECH SENPro

Cost-efficiency: The SENpro is a cost-effective spectroscopic ellipsometer without compromising advanced measurement performance. Preset angle of...

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Gaertner Scientific In Situ Stokes Ellipsometer L104ST

A super fast, reliable, no moving parts ellipsometer that is ideal for measuring the rapid growing or etching of films in situ within your reactor....

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J.A. Wollam RC2

Dual rotating compensator technology gives the ability to determine all 16 Mueller Matrix elements.

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Entrepix Focus FE-IV

The Rudolph FE IV Focus Ellipsometer is designed to provide precision film thickness measurements with simplicity of use. The system's long-life HeNe...

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Horiba UVISEL Extended Range

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL ER: 190-2100 nm.

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Accurion nanofilm_ep4 as Laser Setup

A selection of different lasers are available as a first and only light source in your single wavelength instrument. It can also been selected as a...

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Gaertner Scientific Stokes Ellipsometer LSE-USB

With convenient USB interface is based on advanced StokesMeter™ technology (previous winner of Photonics Spectra and R&D 100 best new products...

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SENTECH CER SE 500adv

Combined Ellipsometry Reflectometry: The combination of ellipsometry and reflectometry allows for fast and unambiguous determination of the...

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SCI FilmTek 4000

FilmTek 4000 is our most advanced model for thick-film applications. It incorporates multiple detectors positioned at different angles of incidence -...

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J.A. Wollham IR-VASE

Covers a wide spectral range from 2 to 30 microns. This ellipsometer is used to characterize both thin films and bulk materials.

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SCI FilmTek SE

The FilmTek SE is a high performance spectroscopic ellipsometer for thin film characterization that measures from the deep UV to NIR (190 - 1700 nm).

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Anstrom Sun SE200BA-MSP

Wavelength range: 250 to 1000 nm for SE and 400 to 850nm for MSP

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SENTECH SENresearch

The SENresearch spectroscopic ellipsometer family covers the widest spectral range from 190 nm (deep UV) to 3,500 nm (NIR) in one tool. FTIR is...

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Gaertner Scientific Multiwavelength L2W

The Two Wavelength Ellipsometers use additional laser sources to analyze difficult films. They give refractive index results in near period regions,...

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J.A. Wollam M-2000

Rotating compensator technology. Many spectral ranges available from 193 to 1690nm.

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Entrepix Focus FE-III

The Rudolph FE III Focus Ellipsometer is designed to provide precision film thickness measurements with simplicity of use. The system's long-life...

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Horiba UVISEL NIR

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL NIR: 245-2100 nm.

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Angstom Sun SE200BA

SE500BA is most advanced model among SE series. It covers DUV to NIR range (190 / 250 to 1700 nm) with automatic goniometer for incident angle...

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DigiPol Elli-SE

Elli-SE Spectroscopic Ellipsometer (SE) is the industry standard technology that enables one to accurately measure thickness and optical constants of...

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