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Accurion nanofilm_ep4

Elli Type
Elli Wavelenght
250 - 1700 nm
Elli Imaging
Elli Spectroscopy
Elli Alignment
Manually or Auto
Imaging: The new generation of microscopic thin film, surface and materials metrology tool uses a combination of auto nulling ellipsometry and microscopy to enable surface characterization with lateral resolution as small as 1 micron. This enables resolving sample areas 1000 times smaller than most non-imaging ellipsometers, even if they use micro spot spectroscopic option.

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