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J.A. Wollham VUV-VASE

Elli Type
Spectroscopic
Elli Wavelenght
146 - 2500 nm
Elli Spectroscopy
Elli Alignment
Auto
Spectroscopic ellipsometer covering the vacuum UV to the NIR. Perfect for lithography applications at 248nm, 193nm, and 157nm. Spectral range from 146-2500nm.

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