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LayTec EpiCurve TT

Elli Type
Laser Ellipsometer
Elli Wavelenght
405, 633, 950 nm (others on request)
Elli Spectroscopy
-
The EpiCurve TT system combines wafer curvature measurements with all the features of the EpiTT: emissivity-corrected pyrometry and growth rate/thickness measurements by three-wavelength reflectance.

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