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LayTec EpiCurve TT

Elli Type
Laser Ellipsometer
Elli Wavelenght
405, 633, 950 nm (others on request)
Elli Spectroscopy
The EpiCurve TT system combines wafer curvature measurements with all the features of the EpiTT: emissivity-corrected pyrometry and growth rate/thickness measurements by three-wavelength reflectance.

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