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SEMILAB SE 2000

Elli Type
Spectroscopic
Elli Wavelenght
193 nm - 25 µm
Elli Imaging
Mapping
Elli Spectroscopy
Spectroscopic Ellipsometry for thin film thickness and optical functions, including complex multilayer structures
Generalized Ellipsometry for Anisotropic materials
Transmission Ellipsometry for transparent substrates
Scatterometry vs. wavelength and angle of incidence
Mueller Matrix (11 or 16 elements) uniquely offered in combination with Scatterometry for 3D anisotropic materials
Jones Matrix for simple anisotropic materials
Reflectance & Transmittance vs. wavelength and incidence angle
Polarimetry
Porosimetry: Measurements of pore size and porosity in thin films
In-situ measurement mode for real time control during deposition or etch process

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