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SENTECH SENDURO

Elli Type
Spectroscopic
Elli Imaging
Mapping
Elli Spectroscopy
The fully automated spectroscopic ellipsometry featured by the ellipsometer SENDURO® relieves the user from manually aligning the sample by height and tilt required for highly precise and repeatable spectroscopic ellipsometry. The patented automatic alignment sensor strongly reduces operation errors, works for transparent and reflective samples, and makes automatic maps possible even on bent wafers.

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