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Gerneral Information

Ellipsometry is an optical technique for investigating the dielectric properties (complex refractive index or dielectric function) of thin films. Ellipsometry can be used to characterize composition, roughness, thickness (depth), crystalline nature, doping concentration, electrical conductivity and other material properties. It is very sensitive to the change in the optical response of incident radiation that interacts with the material being investigated.

Typically, the measured signal is the change in polarization as the incident radiation (in a known state) interacts with the material structure of interest (reflected, absorbed, scattered, or transmitted). The polarization change is quantified by the amplitude ratio, Ψ, and the phase difference, Δ (defined below). Because the signal depends on the thickness as well as the materials properties, ellipsometry can be a universal tool [1] for contact free determination of thickness and optical constants of films of all kinds.

Here is a market overview of instruments made by specialist manufacturers and companies around the globe.

Ellipsometer

Gaertner Scientific Multiwavelength L3W

The Three Wavelength Ellipsometers use additional laser sources to analyze difficult films. They give refractive index results in near period...

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Gaertner Scientific Stokes WAFERSKAN Ellipsometer LSE-WS

High speed film thickness mapping system measuring one site per second including stage travel! It uses advanced StokesMeter™ technology to give...

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Gaertner Scientific Two Angle Two Wave Stokes Waferskan LSE-WS2A2W

High speed film thickness mapping system automatically measures each site at 70° with a red laser and 60° incident angle with a green laser. It is a...

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Gaertner Scientific Stokes Microspot Ellipsometer LSE-MS

Offers a 15 micron measuring laser beam diameter, manual 2x2 inch micrometer positioning stage and a CCD camera for viewing the area of measurement...

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Gaertner Scientific In Situ Stokes Ellipsometer L104ST

A super fast, reliable, no moving parts ellipsometer that is ideal for measuring the rapid growing or etching of films in situ within your reactor....

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Gaertner Scientific Stokes Ellipsometer LSE-USB

With convenient USB interface is based on advanced StokesMeter™ technology (previous winner of Photonics Spectra and R&D 100 best new products...

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Gaertner Scientific Multiwavelength L2W

The Two Wavelength Ellipsometers use additional laser sources to analyze difficult films. They give refractive index results in near period regions,...

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Gaertner Scientific Stokes Ellipsometer LSE-Traveler

The LSE –TRAVELER is designed to be shipped or checked as airline luggage, the rugged LSE-TRAVELER fits into a airline safe foam filled travel case...

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Gaertner Scientific Two Angle Two Wave Stokes Ellipsometer LSE-2A2W

Automatically measures with both a red laser at 70° and green laser at 60° incidence angle. The 2 angle 2 wave capability determines thicker film...

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