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Gerneral Information

Ellipsometry is an optical technique for investigating the dielectric properties (complex refractive index or dielectric function) of thin films. Ellipsometry can be used to characterize composition, roughness, thickness (depth), crystalline nature, doping concentration, electrical conductivity and other material properties. It is very sensitive to the change in the optical response of incident radiation that interacts with the material being investigated.

Typically, the measured signal is the change in polarization as the incident radiation (in a known state) interacts with the material structure of interest (reflected, absorbed, scattered, or transmitted). The polarization change is quantified by the amplitude ratio, Ψ, and the phase difference, Δ (defined below). Because the signal depends on the thickness as well as the materials properties, ellipsometry can be a universal tool [1] for contact free determination of thickness and optical constants of films of all kinds.

Here is a market overview of instruments made by specialist manufacturers and companies around the globe.

Ellipsometer

SENTECH SENDIRA FTIR

Ellipsometric vibrational spectroscopy: The composition of thin layers is analyzed using the absorption bands of molecular vibrational modes in the...

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SENTECH SENPro

Cost-efficiency: The SENpro is a cost-effective spectroscopic ellipsometer without compromising advanced measurement performance. Preset angle of...

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SENTECH CER SE 500adv

Combined Ellipsometry Reflectometry: The combination of ellipsometry and reflectometry allows for fast and unambiguous determination of the...

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SENTECH SENresearch

The SENresearch spectroscopic ellipsometer family covers the widest spectral range from 190 nm (deep UV) to 3,500 nm (NIR) in one tool. FTIR is...

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SENTECH SE 400adv

Multiple angle laser ellipsometer: The SE 400adv is the SENTECH laser ellipsometer for thickness measurement of ultra thin single films. The compact...

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SENTECH SENDURO

The fully automated spectroscopic ellipsometry featured by the ellipsometer SENDURO® relieves the user from manually aligning the sample by height...

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