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Gerneral Information

Ellipsometry is an optical technique for investigating the dielectric properties (complex refractive index or dielectric function) of thin films. Ellipsometry can be used to characterize composition, roughness, thickness (depth), crystalline nature, doping concentration, electrical conductivity and other material properties. It is very sensitive to the change in the optical response of incident radiation that interacts with the material being investigated.

Typically, the measured signal is the change in polarization as the incident radiation (in a known state) interacts with the material structure of interest (reflected, absorbed, scattered, or transmitted). The polarization change is quantified by the amplitude ratio, Ψ, and the phase difference, Δ (defined below). Because the signal depends on the thickness as well as the materials properties, ellipsometry can be a universal tool [1] for contact free determination of thickness and optical constants of films of all kinds.

Here is a market overview of instruments made by specialist manufacturers and companies around the globe.

Ellipsometer

SENTECH SE 400adv

Multiple angle laser ellipsometer: The SE 400adv is the SENTECH laser ellipsometer for thickness measurement of ultra thin single films. The compact...

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Gaertner Scientific Two Angle Two Wave Stokes Waferskan LSE-WS2A2W

High speed film thickness mapping system automatically measures each site at 70° with a red laser and 60° incident angle with a green laser. It is a...

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Gaertner Scientific Stokes Microspot Ellipsometer LSE-MS

Offers a 15 micron measuring laser beam diameter, manual 2x2 inch micrometer positioning stage and a CCD camera for viewing the area of measurement...

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Entrepix Focus FE-IV

The Rudolph FE IV Focus Ellipsometer is designed to provide precision film thickness measurements with simplicity of use. The system's long-life HeNe...

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Gaertner Scientific In Situ Stokes Ellipsometer L104ST

A super fast, reliable, no moving parts ellipsometer that is ideal for measuring the rapid growing or etching of films in situ within your reactor....

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Gaertner Scientific Stokes Ellipsometer LSE-USB

With convenient USB interface is based on advanced StokesMeter™ technology (previous winner of Photonics Spectra and R&D 100 best new products...

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Entrepix Focus FE-III

The Rudolph FE III Focus Ellipsometer is designed to provide precision film thickness measurements with simplicity of use. The system's long-life...

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Gaertner Scientific Multiwavelength L2W

The Two Wavelength Ellipsometers use additional laser sources to analyze difficult films. They give refractive index results in near period regions,...

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Accurion nanofilm_ep4 as Laser Setup

A selection of different lasers are available as a first and only light source in your single wavelength instrument. It can also been selected as a...

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Lambda Scientific LEOI-44 (Experimental Demonstrator)

This is a manually operated experimental demonstrator of ellipsometry. An input beam of random polarization is first transferred to a linearly...

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Gaertner Scientific Stokes Ellipsometer LSE-Traveler

The LSE –TRAVELER is designed to be shipped or checked as airline luggage, the rugged LSE-TRAVELER fits into a airline safe foam filled travel case...

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Gaertner Scientific Two Angle Two Wave Stokes Ellipsometer LSE-2A2W

Automatically measures with both a red laser at 70° and green laser at 60° incidence angle. The 2 angle 2 wave capability determines thicker film...

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LayTec EpiCurve TT

The EpiCurve TT system combines wafer curvature measurements with all the features of the EpiTT: emissivity-corrected pyrometry and growth...

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SENTECH CER SE 500adv

Combined Ellipsometry Reflectometry: The combination of ellipsometry and reflectometry allows for fast and unambiguous determination of the...

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Gaertner Scientific Multiwavelength L3W

The Three Wavelength Ellipsometers use additional laser sources to analyze difficult films. They give refractive index results in near period...

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Gaertner Scientific Stokes WAFERSKAN Ellipsometer LSE-WS

High speed film thickness mapping system measuring one site per second including stage travel! It uses advanced StokesMeter™ technology to give...

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Entrepix Focus FE-VII

The Rudolph FE VII Focus Ellipsometer is designed to provide precision film thickness measurements with simplicity of use. The system's long-life...

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