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Gerneral Information

Ellipsometry is an optical technique for investigating the dielectric properties (complex refractive index or dielectric function) of thin films. Ellipsometry can be used to characterize composition, roughness, thickness (depth), crystalline nature, doping concentration, electrical conductivity and other material properties. It is very sensitive to the change in the optical response of incident radiation that interacts with the material being investigated.

Typically, the measured signal is the change in polarization as the incident radiation (in a known state) interacts with the material structure of interest (reflected, absorbed, scattered, or transmitted). The polarization change is quantified by the amplitude ratio, Ψ, and the phase difference, Δ (defined below). Because the signal depends on the thickness as well as the materials properties, ellipsometry can be a universal tool [1] for contact free determination of thickness and optical constants of films of all kinds.

Here is a market overview of instruments made by specialist manufacturers and companies around the globe.

Ellipsometer

J.A. Wollham IR-VASE

Covers a wide spectral range from 2 to 30 microns. This ellipsometer is used to characterize both thin films and bulk materials.

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Angstrom Sun SE200BM-M300

Wavelength range: 250 to 1100 nm

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HORIBA Smart SE

Designed for your thin film measurements, to deliver maximum efficiency with simplicity: The Auto SE is a new thin film measurement tool that allows...

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J.A. Wollam M-2000

Rotating compensator technology. Many spectral ranges available from 193 to 1690nm.

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Horiba UVISEL NIR

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL NIR: 245-2100 nm.

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SCI FilmTek 4000

FilmTek 4000 is our most advanced model for thick-film applications. It incorporates multiple detectors positioned at different angles of incidence -...

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Accurion nanofilm_ep4 as LDLS Setup

The nanofilm_ep4 uses a variety of unique features that allow the visualization of your surface in real time. This is the LDLS - Laser driven light...

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SENTECH SENPro

Cost-efficiency: The SENpro is a cost-effective spectroscopic ellipsometer without compromising advanced measurement performance. Preset angle of...

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J.A. Wollham VUV-VASE

Spectroscopic ellipsometer covering the vacuum UV to the NIR. Perfect for lithography applications at 248nm, 193nm, and 157nm. Spectral range from...

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Anstrom Sun SE200BA-MSP

Wavelength range: 250 to 1000 nm for SE and 400 to 850nm for MSP

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SCI FilmTek SE

The FilmTek SE is a high performance spectroscopic ellipsometer for thin film characterization that measures from the deep UV to NIR (190 - 1700 nm).

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SEMILAB SE 2000

Spectroscopic Ellipsometry for thin film thickness and optical functions, including complex multilayer structures Generalized Ellipsometry for...

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Horiba UVISEL VIS

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL VIS: 210-880 nm.

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DigiPol Elli-SE

Elli-SE Spectroscopic Ellipsometer (SE) is the industry standard technology that enables one to accurately measure thickness and optical constants of...

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SENTECH SENresearch

The SENresearch spectroscopic ellipsometer family covers the widest spectral range from 190 nm (deep UV) to 3,500 nm (NIR) in one tool. FTIR is...

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Angstom Sun SE200BA

SE500BA is most advanced model among SE series. It covers DUV to NIR range (190 / 250 to 1700 nm) with automatic goniometer for incident angle...

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J.A. Wollam V-VASE

Variable angle spectroscopic ellipsometer with wide spectral range of 193-3200nm.

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Angstom Sun SE200BA-M300

Ellipsometer wavelength range: 250 to 1100 nm

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SCI FilmTek Solar 1000 UV

FilmTek Solar / 1000 UV is an accurate and economical film thickness measurement system that is designed specifically for textured substrates. ...

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Accurion nanofilm_ep4

Imaging: The new generation of microscopic thin film, surface and materials metrology tool uses a combination of auto nulling ellipsometry and...

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Horiba UVISEL VUV

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL FUV: 190-880 nm

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Angstrom Sun SE200BM-SOLAR

SE200BM-Solar is designed for Photovaltaic(PV) application. It covers DUV to NIR range (250 to 1100nm) with manual goniometer for incident angle...

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Horiba UVISEL 2 VUV

The UVISEL 2 VUV delivers the fastest thin film measurements over the largest wavelength range.

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J.A. Wollam alpha-SE

Spectroscopic Ellipsometry has never been easier! Simple, low cost system for measuring index and thickness. Spectral range of 380-900nm.

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