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Gerneral Information

Ellipsometry is an optical technique for investigating the dielectric properties (complex refractive index or dielectric function) of thin films. Ellipsometry can be used to characterize composition, roughness, thickness (depth), crystalline nature, doping concentration, electrical conductivity and other material properties. It is very sensitive to the change in the optical response of incident radiation that interacts with the material being investigated.

Typically, the measured signal is the change in polarization as the incident radiation (in a known state) interacts with the material structure of interest (reflected, absorbed, scattered, or transmitted). The polarization change is quantified by the amplitude ratio, Ψ, and the phase difference, Δ (defined below). Because the signal depends on the thickness as well as the materials properties, ellipsometry can be a universal tool [1] for contact free determination of thickness and optical constants of films of all kinds.

Here is a market overview of instruments made by specialist manufacturers and companies around the globe.

Ellipsometer

Horiba UVISEL VIS

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL VIS: 210-880 nm.

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DigiPol Elli-SE

Elli-SE Spectroscopic Ellipsometer (SE) is the industry standard technology that enables one to accurately measure thickness and optical constants of...

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SENTECH SENresearch

The SENresearch spectroscopic ellipsometer family covers the widest spectral range from 190 nm (deep UV) to 3,500 nm (NIR) in one tool. FTIR is...

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Angstom Sun SE200BA

SE500BA is most advanced model among SE series. It covers DUV to NIR range (190 / 250 to 1700 nm) with automatic goniometer for incident angle...

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J.A. Wollam V-VASE

Variable angle spectroscopic ellipsometer with wide spectral range of 193-3200nm.

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Angstom Sun SE200BA-M300

Ellipsometer wavelength range: 250 to 1100 nm

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SCI FilmTek Solar 1000 UV

FilmTek Solar / 1000 UV is an accurate and economical film thickness measurement system that is designed specifically for textured substrates. ...

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Accurion nanofilm_ep4

Imaging: The new generation of microscopic thin film, surface and materials metrology tool uses a combination of auto nulling ellipsometry and...

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Horiba UVISEL VUV

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL FUV: 190-880 nm

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Angstrom Sun SE200BM-SOLAR

SE200BM-Solar is designed for Photovaltaic(PV) application. It covers DUV to NIR range (250 to 1100nm) with manual goniometer for incident angle...

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Horiba UVISEL 2 VUV

The UVISEL 2 VUV delivers the fastest thin film measurements over the largest wavelength range.

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J.A. Wollam alpha-SE

Spectroscopic Ellipsometry has never been easier! Simple, low cost system for measuring index and thickness. Spectral range of 380-900nm.

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HORIBA Auto SE

Designed for your thin film measurements, to deliver maximum efficiency with simplicity: The Auto SE is a new thin film measurement tool that allows...

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SCI FilmTek 1000

FilmTek 1000 is an accurate and economical film thickness measurement system. It combines a fiber-optic spectrophotometer with revolutionary...

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SENTECH SENDURO

The fully automated spectroscopic ellipsometry featured by the ellipsometer SENDURO® relieves the user from manually aligning the sample by height...

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J.A. Wollam T-Solar

The T-Solar™ ellipsometer combines the best photovoltaic measurement technology into a single system designed specifically for textured samples.

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Angstrom Sun SE200BM-M450

Wavelength range: 250 to 850 nm

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Horiba UVISEL 2

The UVISEL 2 includes the widest range of integrated automated features useful for the investigation of all material family. It features a patented...

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J.A. Wollam RC2

Dual rotating compensator technology gives the ability to determine all 16 Mueller Matrix elements.

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Horiba UVISEL Extended Range

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL ER: 190-2100 nm.

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SCI FilmTek 2000

FilmTek 2000 combines a fiber-optic spectrophotometer with revolutionary material modeling software to provide an affordable and reliable tool for...

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SENTECH SENDIRA FTIR

Ellipsometric vibrational spectroscopy: The composition of thin layers is analyzed using the absorption bands of molecular vibrational modes in the...

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J.A. Wollham IR-VASE

Covers a wide spectral range from 2 to 30 microns. This ellipsometer is used to characterize both thin films and bulk materials.

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Angstrom Sun SE200BM-M300

Wavelength range: 250 to 1100 nm

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