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Gerneral Information

Ellipsometry is an optical technique for investigating the dielectric properties (complex refractive index or dielectric function) of thin films. Ellipsometry can be used to characterize composition, roughness, thickness (depth), crystalline nature, doping concentration, electrical conductivity and other material properties. It is very sensitive to the change in the optical response of incident radiation that interacts with the material being investigated.

Typically, the measured signal is the change in polarization as the incident radiation (in a known state) interacts with the material structure of interest (reflected, absorbed, scattered, or transmitted). The polarization change is quantified by the amplitude ratio, Ψ, and the phase difference, Δ (defined below). Because the signal depends on the thickness as well as the materials properties, ellipsometry can be a universal tool [1] for contact free determination of thickness and optical constants of films of all kinds.

Here is a market overview of instruments made by specialist manufacturers and companies around the globe.

Ellipsometer

J.A. Wollham IR-VASE

Covers a wide spectral range from 2 to 30 microns. This ellipsometer is used to characterize both thin films and bulk materials.

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SCI FilmTek SE

The FilmTek SE is a high performance spectroscopic ellipsometer for thin film characterization that measures from the deep UV to NIR (190 - 1700 nm).

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Anstrom Sun SE200BA-MSP

Wavelength range: 250 to 1000 nm for SE and 400 to 850nm for MSP

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SENTECH SENresearch

The SENresearch spectroscopic ellipsometer family covers the widest spectral range from 190 nm (deep UV) to 3,500 nm (NIR) in one tool. FTIR is...

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Gaertner Scientific Multiwavelength L2W

The Two Wavelength Ellipsometers use additional laser sources to analyze difficult films. They give refractive index results in near period regions,...

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J.A. Wollam M-2000

Rotating compensator technology. Many spectral ranges available from 193 to 1690nm.

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Entrepix Focus FE-III

The Rudolph FE III Focus Ellipsometer is designed to provide precision film thickness measurements with simplicity of use. The system's long-life...

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Horiba UVISEL NIR

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL NIR: 245-2100 nm.

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Angstom Sun SE200BA

SE500BA is most advanced model among SE series. It covers DUV to NIR range (190 / 250 to 1700 nm) with automatic goniometer for incident angle...

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DigiPol Elli-SE

Elli-SE Spectroscopic Ellipsometer (SE) is the industry standard technology that enables one to accurately measure thickness and optical constants of...

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SENTECH SE 400adv

Multiple angle laser ellipsometer: The SE 400adv is the SENTECH laser ellipsometer for thickness measurement of ultra thin single films. The compact...

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Gaertner Scientific Stokes Ellipsometer LSE-Traveler

The LSE –TRAVELER is designed to be shipped or checked as airline luggage, the rugged LSE-TRAVELER fits into a airline safe foam filled travel case...

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J.A. Wollham VUV-VASE

Spectroscopic ellipsometer covering the vacuum UV to the NIR. Perfect for lithography applications at 248nm, 193nm, and 157nm. Spectral range from...

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LayTec EpiCurve TT

The EpiCurve TT system combines wafer curvature measurements with all the features of the EpiTT: emissivity-corrected pyrometry and growth...

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Angstom Sun SE200BA-M300

Ellipsometer wavelength range: 250 to 1100 nm

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Gaertner Scientific Two Angle Two Wave Stokes Ellipsometer LSE-2A2W

Automatically measures with both a red laser at 70° and green laser at 60° incidence angle. The 2 angle 2 wave capability determines thicker film...

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Lambda Scientific LEOI-44 (Experimental Demonstrator)

This is a manually operated experimental demonstrator of ellipsometry. An input beam of random polarization is first transferred to a linearly...

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SCI FilmTek Solar 1000 UV

FilmTek Solar / 1000 UV is an accurate and economical film thickness measurement system that is designed specifically for textured substrates. ...

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Horiba UVISEL VIS

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL VIS: 210-880 nm.

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Horiba UVISEL 2 VUV

The UVISEL 2 VUV delivers the fastest thin film measurements over the largest wavelength range.

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Angstrom Sun SE200BM-SOLAR

SE200BM-Solar is designed for Photovaltaic(PV) application. It covers DUV to NIR range (250 to 1100nm) with manual goniometer for incident angle...

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SENTECH SENDURO

The fully automated spectroscopic ellipsometry featured by the ellipsometer SENDURO® relieves the user from manually aligning the sample by height...

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Gaertner Scientific Multiwavelength L3W

The Three Wavelength Ellipsometers use additional laser sources to analyze difficult films. They give refractive index results in near period...

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J.A. Wollam V-VASE

Variable angle spectroscopic ellipsometer with wide spectral range of 193-3200nm.

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