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Gerneral Information

Ellipsometry is an optical technique for investigating the dielectric properties (complex refractive index or dielectric function) of thin films. Ellipsometry can be used to characterize composition, roughness, thickness (depth), crystalline nature, doping concentration, electrical conductivity and other material properties. It is very sensitive to the change in the optical response of incident radiation that interacts with the material being investigated.

Typically, the measured signal is the change in polarization as the incident radiation (in a known state) interacts with the material structure of interest (reflected, absorbed, scattered, or transmitted). The polarization change is quantified by the amplitude ratio, Ψ, and the phase difference, Δ (defined below). Because the signal depends on the thickness as well as the materials properties, ellipsometry can be a universal tool [1] for contact free determination of thickness and optical constants of films of all kinds.

Here is a market overview of instruments made by specialist manufacturers and companies around the globe.

Ellipsometer

Angstom Sun SE200BA-M300

Ellipsometer wavelength range: 250 to 1100 nm

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Gaertner Scientific Two Angle Two Wave Stokes Ellipsometer LSE-2A2W

Automatically measures with both a red laser at 70° and green laser at 60° incidence angle. The 2 angle 2 wave capability determines thicker film...

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SCI FilmTek Solar 1000 UV

FilmTek Solar / 1000 UV is an accurate and economical film thickness measurement system that is designed specifically for textured substrates. ...

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Lambda Scientific LEOI-44 (Experimental Demonstrator)

This is a manually operated experimental demonstrator of ellipsometry. An input beam of random polarization is first transferred to a linearly...

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Horiba UVISEL 2 VUV

The UVISEL 2 VUV delivers the fastest thin film measurements over the largest wavelength range.

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Horiba UVISEL VIS

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL VIS: 210-880 nm.

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Angstrom Sun SE200BM-SOLAR

SE200BM-Solar is designed for Photovaltaic(PV) application. It covers DUV to NIR range (250 to 1100nm) with manual goniometer for incident angle...

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Gaertner Scientific Multiwavelength L3W

The Three Wavelength Ellipsometers use additional laser sources to analyze difficult films. They give refractive index results in near period...

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SENTECH SENDURO

The fully automated spectroscopic ellipsometry featured by the ellipsometer SENDURO® relieves the user from manually aligning the sample by height...

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Metricon Model 2010/M Prism Coupler

Compared to instruments based on optical interference, ellipsometry, or Abbe refractometry, the 2010/M’s prism coupling technology provides unmatched...

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J.A. Wollam V-VASE

Variable angle spectroscopic ellipsometer with wide spectral range of 193-3200nm.

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HORIBA Auto SE

Designed for your thin film measurements, to deliver maximum efficiency with simplicity: The Auto SE is a new thin film measurement tool that allows...

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Gaertner Scientific Stokes WAFERSKAN Ellipsometer LSE-WS

High speed film thickness mapping system measuring one site per second including stage travel! It uses advanced StokesMeter™ technology to give...

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SCI FilmTek 1000

FilmTek 1000 is an accurate and economical film thickness measurement system. It combines a fiber-optic spectrophotometer with revolutionary...

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SEMILAB SE 2000

Spectroscopic Ellipsometry for thin film thickness and optical functions, including complex multilayer structures Generalized Ellipsometry for...

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Horiba UVISEL 2

The UVISEL 2 includes the widest range of integrated automated features useful for the investigation of all material family. It features a patented...

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Horiba UVISEL VUV

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL FUV: 190-880 nm

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Angstrom Sun SE200BM-M450

Wavelength range: 250 to 850 nm

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Gaertner Scientific Two Angle Two Wave Stokes Waferskan LSE-WS2A2W

High speed film thickness mapping system automatically measures each site at 70° with a red laser and 60° incident angle with a green laser. It is a...

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SENTECH SENDIRA FTIR

Ellipsometric vibrational spectroscopy: The composition of thin layers is analyzed using the absorption bands of molecular vibrational modes in the...

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Entrepix Focus FE-VII

The Rudolph FE VII Focus Ellipsometer is designed to provide precision film thickness measurements with simplicity of use. The system's long-life...

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J.A. Wollam alpha-SE

Spectroscopic Ellipsometry has never been easier! Simple, low cost system for measuring index and thickness. Spectral range of 380-900nm.

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Accurion nanofilm_ep4 as LDLS Setup

The nanofilm_ep4 uses a variety of unique features that allow the visualization of your surface in real time. This is the LDLS - Laser driven light...

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Horiba UVISEL LT

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL LT: cost-effective ellipsometer.

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