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Gerneral Information

Ellipsometry is an optical technique for investigating the dielectric properties (complex refractive index or dielectric function) of thin films. Ellipsometry can be used to characterize composition, roughness, thickness (depth), crystalline nature, doping concentration, electrical conductivity and other material properties. It is very sensitive to the change in the optical response of incident radiation that interacts with the material being investigated.

Typically, the measured signal is the change in polarization as the incident radiation (in a known state) interacts with the material structure of interest (reflected, absorbed, scattered, or transmitted). The polarization change is quantified by the amplitude ratio, Ψ, and the phase difference, Δ (defined below). Because the signal depends on the thickness as well as the materials properties, ellipsometry can be a universal tool [1] for contact free determination of thickness and optical constants of films of all kinds.

Here is a market overview of instruments made by specialist manufacturers and companies around the globe.



Spectroscopic Ellipsometry for thin film thickness and optical functions, including complex multilayer structures Generalized Ellipsometry for...


Anstrom Sun SE200BA-MSP

Wavelength range: 250 to 1000 nm for SE and 400 to 850nm for MSP


SCI FilmTek 1000

FilmTek 1000 is an accurate and economical film thickness measurement system. It combines a fiber-optic spectrophotometer with revolutionary...


Lambda Scientific LEOI-44 (Experimental Demonstrator)

This is a manually operated experimental demonstrator of ellipsometry. An input beam of random polarization is first transferred to a linearly...


Angstrom Sun SE200BM-M300

Wavelength range: 250 to 1100 nm


SCI FilmTek Solar 1000 UV

FilmTek Solar / 1000 UV is an accurate and economical film thickness measurement system that is designed specifically for textured substrates. ...


J.A. Wollam M-2000

Rotating compensator technology. Many spectral ranges available from 193 to 1690nm.


Angstrom Sun SE200BM-M450

Wavelength range: 250 to 850 nm


Entrepix Focus FE-III

The Rudolph FE III Focus Ellipsometer is designed to provide precision film thickness measurements with simplicity of use. The system's long-life...


J.A. Wollam RC2

Dual rotating compensator technology gives the ability to determine all 16 Mueller Matrix elements.


Angstrom Sun SE200BM-SOLAR

SE200BM-Solar is designed for Photovaltaic(PV) application. It covers DUV to NIR range (250 to 1100nm) with manual goniometer for incident angle...


Entrepix Focus FE-IV

The Rudolph FE IV Focus Ellipsometer is designed to provide precision film thickness measurements with simplicity of use. The system's long-life HeNe...


J.A. Wollam alpha-SE

Spectroscopic Ellipsometry has never been easier! Simple, low cost system for measuring index and thickness. Spectral range of 380-900nm.


DigiPol Elli-SE

Elli-SE Spectroscopic Ellipsometer (SE) is the industry standard technology that enables one to accurately measure thickness and optical constants of...


Entrepix Focus FE-VII

The Rudolph FE VII Focus Ellipsometer is designed to provide precision film thickness measurements with simplicity of use. The system's long-life...


J.A. Wollam V-VASE

Variable angle spectroscopic ellipsometer with wide spectral range of 193-3200nm.


Gaertner Scientific Stokes Ellipsometer LSE-USB

With convenient USB interface is based on advanced StokesMeter™ technology (previous winner of Photonics Spectra and R&D 100 best new products...


Metricon Model 2010/M Prism Coupler

Compared to instruments based on optical interference, ellipsometry, or Abbe refractometry, the 2010/M’s prism coupling technology provides unmatched...


J.A. Wollham VUV-VASE

Spectroscopic ellipsometer covering the vacuum UV to the NIR. Perfect for lithography applications at 248nm, 193nm, and 157nm. Spectral range from...


Gaertner Scientific Stokes Microspot Ellipsometer LSE-MS

Offers a 15 micron measuring laser beam diameter, manual 2x2 inch micrometer positioning stage and a CCD camera for viewing the area of measurement...


LayTec EpiCurve TT

The EpiCurve TT system combines wafer curvature measurements with all the features of the EpiTT: emissivity-corrected pyrometry and growth...


J.A. Wollham IR-VASE

Covers a wide spectral range from 2 to 30 microns. This ellipsometer is used to characterize both thin films and bulk materials.


Gaertner Scientific Stokes WAFERSKAN Ellipsometer LSE-WS

High speed film thickness mapping system measuring one site per second including stage travel! It uses advanced StokesMeter™ technology to give...


SCI FilmTek SE

The FilmTek SE is a high performance spectroscopic ellipsometer for thin film characterization that measures from the deep UV to NIR (190 - 1700 nm).


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