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Gerneral Information

Ellipsometry is an optical technique for investigating the dielectric properties (complex refractive index or dielectric function) of thin films. Ellipsometry can be used to characterize composition, roughness, thickness (depth), crystalline nature, doping concentration, electrical conductivity and other material properties. It is very sensitive to the change in the optical response of incident radiation that interacts with the material being investigated.

Typically, the measured signal is the change in polarization as the incident radiation (in a known state) interacts with the material structure of interest (reflected, absorbed, scattered, or transmitted). The polarization change is quantified by the amplitude ratio, Ψ, and the phase difference, Δ (defined below). Because the signal depends on the thickness as well as the materials properties, ellipsometry can be a universal tool [1] for contact free determination of thickness and optical constants of films of all kinds.

Here is a market overview of instruments made by specialist manufacturers and companies around the globe.

Ellipsometer

J.A. Wollam V-VASE

Variable angle spectroscopic ellipsometer with wide spectral range of 193-3200nm.

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Gaertner Scientific Stokes Ellipsometer LSE-USB

With convenient USB interface is based on advanced StokesMeter™ technology (previous winner of Photonics Spectra and R&D 100 best new products...

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Metricon Model 2010/M Prism Coupler

Compared to instruments based on optical interference, ellipsometry, or Abbe refractometry, the 2010/M’s prism coupling technology provides unmatched...

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J.A. Wollham VUV-VASE

Spectroscopic ellipsometer covering the vacuum UV to the NIR. Perfect for lithography applications at 248nm, 193nm, and 157nm. Spectral range from...

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Gaertner Scientific Stokes Microspot Ellipsometer LSE-MS

Offers a 15 micron measuring laser beam diameter, manual 2x2 inch micrometer positioning stage and a CCD camera for viewing the area of measurement...

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LayTec EpiCurve TT

The EpiCurve TT system combines wafer curvature measurements with all the features of the EpiTT: emissivity-corrected pyrometry and growth...

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J.A. Wollham IR-VASE

Covers a wide spectral range from 2 to 30 microns. This ellipsometer is used to characterize both thin films and bulk materials.

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Gaertner Scientific Stokes WAFERSKAN Ellipsometer LSE-WS

High speed film thickness mapping system measuring one site per second including stage travel! It uses advanced StokesMeter™ technology to give...

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SCI FilmTek SE

The FilmTek SE is a high performance spectroscopic ellipsometer for thin film characterization that measures from the deep UV to NIR (190 - 1700 nm).

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J.A. Wollam T-Solar

The T-Solar™ ellipsometer combines the best photovoltaic measurement technology into a single system designed specifically for textured samples.

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Gaertner Scientific Two Angle Two Wave Stokes Ellipsometer LSE-2A2W

Automatically measures with both a red laser at 70° and green laser at 60° incidence angle. The 2 angle 2 wave capability determines thicker film...

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HORIBA Smart SE

Designed for your thin film measurements, to deliver maximum efficiency with simplicity: The Auto SE is a new thin film measurement tool that allows...

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SENTECH SENresearch

The SENresearch spectroscopic ellipsometer family covers the widest spectral range from 190 nm (deep UV) to 3,500 nm (NIR) in one tool. FTIR is...

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Horiba UVISEL VUV

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL FUV: 190-880 nm

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Gaertner Scientific Multiwavelength L2W

The Two Wavelength Ellipsometers use additional laser sources to analyze difficult films. They give refractive index results in near period regions,...

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Horiba UVISEL 2

The UVISEL 2 includes the widest range of integrated automated features useful for the investigation of all material family. It features a patented...

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SENTECH SENPro

Cost-efficiency: The SENpro is a cost-effective spectroscopic ellipsometer without compromising advanced measurement performance. Preset angle of...

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Horiba UVISEL VIS

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL VIS: 210-880 nm.

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Gaertner Scientific In Situ Stokes Ellipsometer L104ST

A super fast, reliable, no moving parts ellipsometer that is ideal for measuring the rapid growing or etching of films in situ within your reactor....

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Horiba UVISEL 2 VUV

The UVISEL 2 VUV delivers the fastest thin film measurements over the largest wavelength range.

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SENTECH SENDIRA FTIR

Ellipsometric vibrational spectroscopy: The composition of thin layers is analyzed using the absorption bands of molecular vibrational modes in the...

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Horiba UVISEL NIR

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL NIR: 245-2100 nm.

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Gaertner Scientific Two Angle Two Wave Stokes Waferskan LSE-WS2A2W

High speed film thickness mapping system automatically measures each site at 70° with a red laser and 60° incident angle with a green laser. It is a...

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Angstom Sun SE200BA

SE500BA is most advanced model among SE series. It covers DUV to NIR range (190 / 250 to 1700 nm) with automatic goniometer for incident angle...

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