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Gerneral Information

Ellipsometry is an optical technique for investigating the dielectric properties (complex refractive index or dielectric function) of thin films. Ellipsometry can be used to characterize composition, roughness, thickness (depth), crystalline nature, doping concentration, electrical conductivity and other material properties. It is very sensitive to the change in the optical response of incident radiation that interacts with the material being investigated.

Typically, the measured signal is the change in polarization as the incident radiation (in a known state) interacts with the material structure of interest (reflected, absorbed, scattered, or transmitted). The polarization change is quantified by the amplitude ratio, Ψ, and the phase difference, Δ (defined below). Because the signal depends on the thickness as well as the materials properties, ellipsometry can be a universal tool [1] for contact free determination of thickness and optical constants of films of all kinds.

Here is a market overview of instruments made by specialist manufacturers and companies around the globe.

Ellipsometer

Gaertner Scientific In Situ Stokes Ellipsometer L104ST

A super fast, reliable, no moving parts ellipsometer that is ideal for measuring the rapid growing or etching of films in situ within your reactor....

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J.A. Wollam V-VASE

Variable angle spectroscopic ellipsometer with wide spectral range of 193-3200nm.

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Gaertner Scientific Two Angle Two Wave Stokes Waferskan LSE-WS2A2W

High speed film thickness mapping system automatically measures each site at 70° with a red laser and 60° incident angle with a green laser. It is a...

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J.A. Wollham VUV-VASE

Spectroscopic ellipsometer covering the vacuum UV to the NIR. Perfect for lithography applications at 248nm, 193nm, and 157nm. Spectral range from...

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Gaertner Scientific Multiwavelength L3W

The Three Wavelength Ellipsometers use additional laser sources to analyze difficult films. They give refractive index results in near period...

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J.A. Wollham IR-VASE

Covers a wide spectral range from 2 to 30 microns. This ellipsometer is used to characterize both thin films and bulk materials.

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Gaertner Scientific Stokes Ellipsometer LSE-Traveler

The LSE –TRAVELER is designed to be shipped or checked as airline luggage, the rugged LSE-TRAVELER fits into a airline safe foam filled travel case...

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J.A. Wollam T-Solar

The T-Solar™ ellipsometer combines the best photovoltaic measurement technology into a single system designed specifically for textured samples.

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SCI FilmTek 4000

FilmTek 4000 is our most advanced model for thick-film applications. It incorporates multiple detectors positioned at different angles of incidence -...

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Horiba UVISEL VUV

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL FUV: 190-880 nm

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SCI FilmTek 2000

FilmTek 2000 combines a fiber-optic spectrophotometer with revolutionary material modeling software to provide an affordable and reliable tool for...

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Horiba UVISEL VIS

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL VIS: 210-880 nm.

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SCI FilmTek 1000

FilmTek 1000 is an accurate and economical film thickness measurement system. It combines a fiber-optic spectrophotometer with revolutionary...

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Horiba UVISEL NIR

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL NIR: 245-2100 nm.

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SCI FilmTek Solar 1000 UV

FilmTek Solar / 1000 UV is an accurate and economical film thickness measurement system that is designed specifically for textured substrates. ...

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Horiba UVISEL Extended Range

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL ER: 190-2100 nm.

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Entrepix Focus FE-III

The Rudolph FE III Focus Ellipsometer is designed to provide precision film thickness measurements with simplicity of use. The system's long-life...

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Horiba UVISEL LT

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL LT: cost-effective ellipsometer.

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Entrepix Focus FE-IV

The Rudolph FE IV Focus Ellipsometer is designed to provide precision film thickness measurements with simplicity of use. The system's long-life HeNe...

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HORIBA Auto SE

Designed for your thin film measurements, to deliver maximum efficiency with simplicity: The Auto SE is a new thin film measurement tool that allows...

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SENTECH SENresearch

The SENresearch spectroscopic ellipsometer family covers the widest spectral range from 190 nm (deep UV) to 3,500 nm (NIR) in one tool. FTIR is...

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Entrepix Focus FE-VII

The Rudolph FE VII Focus Ellipsometer is designed to provide precision film thickness measurements with simplicity of use. The system's long-life...

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Angstom Sun SE200BA-M300

Ellipsometer wavelength range: 250 to 1100 nm

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SENTECH SENPro

Cost-efficiency: The SENpro is a cost-effective spectroscopic ellipsometer without compromising advanced measurement performance. Preset angle of...

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