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Gerneral Information

Ellipsometry is an optical technique for investigating the dielectric properties (complex refractive index or dielectric function) of thin films. Ellipsometry can be used to characterize composition, roughness, thickness (depth), crystalline nature, doping concentration, electrical conductivity and other material properties. It is very sensitive to the change in the optical response of incident radiation that interacts with the material being investigated.

Typically, the measured signal is the change in polarization as the incident radiation (in a known state) interacts with the material structure of interest (reflected, absorbed, scattered, or transmitted). The polarization change is quantified by the amplitude ratio, Ψ, and the phase difference, Δ (defined below). Because the signal depends on the thickness as well as the materials properties, ellipsometry can be a universal tool [1] for contact free determination of thickness and optical constants of films of all kinds.

Here is a market overview of instruments made by specialist manufacturers and companies around the globe.

Ellipsometer

SENTECH SE 400adv

Multiple angle laser ellipsometer: The SE 400adv is the SENTECH laser ellipsometer for thickness measurement of ultra thin single films. The compact...

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Horiba UVISEL LT

Ideal for non-destructive, accurate, and versatile thin film characterization in research and industry. UVISEL LT: cost-effective ellipsometer.

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Gaertner Scientific Stokes Ellipsometer LSE-Traveler

The LSE –TRAVELER is designed to be shipped or checked as airline luggage, the rugged LSE-TRAVELER fits into a airline safe foam filled travel case...

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Accurion nanofilm_ep4 as LDLS Setup

The nanofilm_ep4 uses a variety of unique features that allow the visualization of your surface in real time. This is the LDLS - Laser driven light...

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SENTECH CER SE 500adv

Combined Ellipsometry Reflectometry: The combination of ellipsometry and reflectometry allows for fast and unambiguous determination of the...

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HORIBA Auto SE

Designed for your thin film measurements, to deliver maximum efficiency with simplicity: The Auto SE is a new thin film measurement tool that allows...

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SCI FilmTek 4000

FilmTek 4000 is our most advanced model for thick-film applications. It incorporates multiple detectors positioned at different angles of incidence -...

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Accurion nanofilm_ep4

Imaging: The new generation of microscopic thin film, surface and materials metrology tool uses a combination of auto nulling ellipsometry and...

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Angstom Sun SE200BA-M300

Ellipsometer wavelength range: 250 to 1100 nm

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SCI FilmTek 2000

FilmTek 2000 combines a fiber-optic spectrophotometer with revolutionary material modeling software to provide an affordable and reliable tool for...

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SEMILAB SE 2000

Spectroscopic Ellipsometry for thin film thickness and optical functions, including complex multilayer structures Generalized Ellipsometry for...

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Anstrom Sun SE200BA-MSP

Wavelength range: 250 to 1000 nm for SE and 400 to 850nm for MSP

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SCI FilmTek 1000

FilmTek 1000 is an accurate and economical film thickness measurement system. It combines a fiber-optic spectrophotometer with revolutionary...

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Lambda Scientific LEOI-44 (Experimental Demonstrator)

This is a manually operated experimental demonstrator of ellipsometry. An input beam of random polarization is first transferred to a linearly...

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Angstrom Sun SE200BM-M300

Wavelength range: 250 to 1100 nm

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SCI FilmTek Solar 1000 UV

FilmTek Solar / 1000 UV is an accurate and economical film thickness measurement system that is designed specifically for textured substrates. ...

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J.A. Wollam M-2000

Rotating compensator technology. Many spectral ranges available from 193 to 1690nm.

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Angstrom Sun SE200BM-M450

Wavelength range: 250 to 850 nm

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Entrepix Focus FE-III

The Rudolph FE III Focus Ellipsometer is designed to provide precision film thickness measurements with simplicity of use. The system's long-life...

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J.A. Wollam RC2

Dual rotating compensator technology gives the ability to determine all 16 Mueller Matrix elements.

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Angstrom Sun SE200BM-SOLAR

SE200BM-Solar is designed for Photovaltaic(PV) application. It covers DUV to NIR range (250 to 1100nm) with manual goniometer for incident angle...

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Entrepix Focus FE-IV

The Rudolph FE IV Focus Ellipsometer is designed to provide precision film thickness measurements with simplicity of use. The system's long-life HeNe...

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J.A. Wollam alpha-SE

Spectroscopic Ellipsometry has never been easier! Simple, low cost system for measuring index and thickness. Spectral range of 380-900nm.

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DigiPol Elli-SE

Elli-SE Spectroscopic Ellipsometer (SE) is the industry standard technology that enables one to accurately measure thickness and optical constants of...

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