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FEI V400ACE Focused Ion Beam

Ion Gun
Ga liquid metal ion
FIB Resolution
4.5 nm
FIB Acceleration Voltage
0.5 - 30kV
The V400ACE is specifically designed to meet the challenges of advanced designs and processes: smaller geometries, higher circuit densities, exotic materials and complex interconnect structures. The V400ACE can be configured for backside editing with an optional IR microscope and bulk silicon trenching package.

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