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FEI Versa 3D DualBeam

EM Resolution
1.0 @ 30 kV (SE, with Plasma Cleaner option)
EM Magnification
30x - 1.280.000x
EM Acceleration Voltage
0.2 - 30kV
EM Source
Schottky thermal field emitter
EDS
Optional
Focused Ion Beam
Type
FIB-SEM
Ion Gun
Ga Liquid Metal Ion Source
FIB Resolution
7 nm @ 30 kV at beam coincident point (5 nm achievable at optimal working distance)
FIB Acceleration Voltage
0.5 - 30 kV
Building on the history and success of FEI's pioneering DualBeam, low vacuum and ESEM™ expertise, FEI introduces the most versatile DualBeam instrument to date. The Versa 3D offers state-of-the-art imaging and analytical performance to deliver a greater range of 3D data from even your most challenging samples.

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