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TESCAN FERA3 XM

EM Resolution
1.2 nm @ 30 kV (SE, High Vacuum Mode))
EM Magnification
1x - 1.000.000x
EM Acceleration Voltage
0.2kV - 30 kV, 0.05 kV - 30 kV with BDT option
EM Source
Schottky thermal field emitter
EDS
Optional
Focused Ion Beam
-
Type
SEM
Ion Gun
Xe Plasma Ion Source
FIB Resolution
25 nm @ 30 kV at SEM-FIB coincidence point
FIB Acceleration Voltage
3 - 30 kV
Fully controlled SEM with Schottky field emission cathode in combination with Xe Plasma Focused Ion Beam (i-FIB) column and optionally with Gas Injection System (GIS). Outstanding optical properties, flicker-free digital image with super clarity, sophisticated user-friendly software for SEM/FIB/GIS control and image capturing using Windows™ platform, standard formats of stored images, easy image management, processing and measurements, automatic set up of the system and many other automated operations are characteristic features of the equipment.

Equipment Card - Reference

Number of ports:

12+ (configuration and number of ports can be modified to customer’s needs)

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