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TESCAN LYRA3 XM

EM Resolution
1.2 nm @ 30 kV (SE, High Vacuum Mode))
EM Magnification
1x - 1.000.000x
EM Acceleration Voltage
0.2kV - 30 kV, 0.05 kV - 30 kV with BDT option
EM Source
Schottky thermal field emitter
EDS
Optional
Focused Ion Beam
Type
FIB-SEM
Ion Gun
Ga Liquid Metal Ion Source
FIB Resolution
<5 nm @ 30 kV; <2.5 nm @ 30 kV at SEM-FIB coincidence point
FIB Acceleration Voltage
0.5 - 30 kV
A fully PC controlled SEM with Schottky field emission cathode in combination with gallium Focused Ion Beam (FIB) column and optionally with Gas Injection System (GIS). Outstanding optical properties, flicker-free digital image with super clarity, sophisticated user-friendly software for SEM/FIB/GIS control and image capturing using Windows platform, standard formats of stored images, easy image management, processing and measurements, automatic set up of the system and many other automated operations are characteristic features of the equipment.

Equipment Card - Reference

Number of ports:

12+ (configuration and number of ports can be modified to customer’s needs)

 

Sample Stage:

Rotation: 360° continuous

Tilt: –30° to +90°

(Range of the movements can be dependent on WD and configuration)

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