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Zeiss Crossbeam 540

EM Resolution
0.9 nm @ 15kV
EM Magnification
inquire
EM Acceleration Voltage
inquire
EM Source
Schottky thermal field emitter
EDS
Optional
Focused Ion Beam
Type
FIB-SEM
Ion Gun
Ga Liquid Metal Ion Source
FIB Resolution
< 3 nm (statistical method)
FIB Acceleration Voltage
inquire
Crossbeam 540 with GEMINI II
Get high resolution even at low voltage and high current thanks to the double condenser system. Gain more information in less time with high resolution imaging and fast analytics. Profit from unique topographical and material contrast with simultaneous Inlens SE and EsB imaging.

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